Comparison of annealing quality after 3e15/cm2 50 keV BF2+ implant between rapid thermal annealing and furnace annealing

Abstract Low leakage diodes are necessary in order to manufacture high-quality variable capacitance (varicaps), which used voltage-controlled oscillators. Junction current affects the single sideband noise of oscillator by up-conversion 1/ f and shot (Chan et al. IEEE Trans Electron Devices 54(9):2570–2573, 2007, https://doi.org/10.1109/TED.2007.903201 ). Several sources show higher for RTP compared furnace anneal (Lunnon J Electrochem Soc 132(10):2473, 1985, https://doi.org/10.1149/1.2113602 , Gramenova 146(1):359, 1999, https://doi.org/10.1149/1.1391613 Mikoshiba Jpn Appl Phys, 1986, https://doi.org/10.1143/jjap.25.l631 In our experiments, we found lower currents annealing. We present results from annealing experiments where compare three conditions with without oxidizing conditions. Graphical abstract